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Flow Control

Qixing Flowmeter is a leading brand in the Chinese market for mass flowmeters / controllers. It has over 40 years of experience in the development and manufacture of accurate and stable flow measurement and control equipment. It develops thermal and pressure gas mass flow products that accurately measure and control, for each Various market applications provide flow measurement and control solutions. Products have been widely used in industries such as semiconductors, fuel cells, solar energy, vacuum coating, and analytical instruments. The marketing service system covers major countries and regions in Europe, America, and Asia.

Pressure Control

PC series pressure controller are developed based on the advanced technology of CS series. It is strictly in accordance with SEMI standards with high precision, fast response, good repeatability, convenient use, easy communication, scalability and compatibility. There are front pressure control and back pressure control. In addition to standard RS485 output signal, it also provides analog I / O signals. PC series products can be used in semiconductors, photovoltaics, fuel cell, and other voltage control fields.

Display & Power Supply

Flow display and totalizer are used to provide working power, operation control, flow setting, flow digital display and cumulative flow for gas mass flow controller (MFC) and mass flow meter (MFM) Channel, a flow display with multiple channels can be equipped with multiple MFC / MFM, they can work independently of each other.

More Solutions

 

  The gas path plate is the solution of the gas path conveying system developed by the Seven Star flowmeter. Through the design, processing and testing of the gas path schematic diagram, the product realizes the pressure regulation, purity filtration, flow control and other functions of various process gases with diaphragm valve, pressure regulating valve, pressure sensor, filter, MFC and other parts. At present, the traditional VCR type gas path plate and gas are commonly used in the market The integrated gas system, i.e. IGS gas path plate, is capable of undertaking both gas path plate businesses and seven star flowmeter.

  With the development of semiconductor field, higher requirements are put forward for miniaturization of parts and components. The traditional VCR gas circuit disk is difficult to meet the requirements. IGS type gas circuit disk emerges as the times require. It has the characteristics of direct gas transportation, small volume, easy installation and maintenance, which is the development direction of future gas transmission system; After years of research and development experience of MFC, the IGS gas path plate of the Seven Star flowmeter has the advantages of high sealing, high precision and high integration, and can rely on the special gas laboratory established by the Seven Star flowmeter to research and measure the special gas, so as to ensure the high accuracy of the special gas control of the IGS gas path plate.

产品名称

Gas Circuit System

The gas path plate is the solution of the gas path conveying system developed by the Seven Star flowmeter. Through the design, processing and testing of the gas path schematic diagram, the product realizes the pressure regulation, purity filtration, flow control and other functions of various process gases with diaphragm valve, pressure regulating valve, pressure sensor, filter, MFC and other parts. At present, the traditional VCR type gas path plate and gas are commonly used in the market The integrated gas system, i.e. IGS gas path plate, is capable of undertaking both gas path plate businesses and seven star flowmeter.
产品名称

PC100

The PC100-D series pressure controller products use the latest generation control technology for semiconductor and photovoltaic field which provide high accuracy and reliability for the control and measurement of gas pressure.
The PC100-D product is designed with straight channel, equipped with piezoresistive silicon pressure sensor and digital circuit board, which supports wide power supply (+ 15V ~ 24V), and supports both digital signal and 0 ~ 5V analog signal at the same time. It is possible to operate the instrument completely digitally or it can be operated in analog mode with digital monitoring. PC100-D series have high control accuracy, fast response time (< 1s), corrosion resistance and insensitive position. The client software and secondary development of control and acquisition is available through the open protocol.
产品名称

D08-2F-3F-4F

The flow display and the flow integrating instrument are used for providing Mass Flow Controller (MFC) and Mass Flow Meter (MFM) with working power, operation control, flow setting, flow digits display, flow accumulation and etc, which are divided into single channel and multiple-channel. The multiple-channel flow display can be equipped with multiple MFC/MFM, they can work individually.
Features
产品名称

D08-2E-3E-4E

The flow display and the flow integrating instrument are used for providing Mass Flow Controller (MFC) and Mass Flow Meter (MFM) with working power, operation control, flow setting, flow digits display, flow accumulation and etc, which are divided into single channel and multiple-channel. The multiple-channel flow display can be equipped with multiple MFC/MFM, they can work individually.
产品名称

D08-1G

The flow display and the flow integrating instrument are used for providing Mass Flow Controller (MFC) and Mass Flow Meter (MFM) with working power, operation control, flow setting, flow digits display, flow accumulation and etc, which are divided into single channel and multiple-channel. The multiple-channel flow display can be equipped with multiple MFC/MFM, they can work individually.
产品名称

D08-1K

The flow display and the flow integrating instrument are used for providing Mass Flow Controller (MFC) and Mass Flow Meter (MFM) with working power, operation control, flow setting, flow digits display, flow accumulation and etc, which are divided into single channel and multiple-channel. The multiple-channel flow display can be equipped with multiple MFC/MFM, they can work individually.
产品名称

D08-1F

  The flow display and the flow integrating instrument are used for providing Mass Flow Controller (MFC) and Mass Flow Meter (MFM) with working power supply, operation control, flow setting, flow digits display, flow accumulation etc, which are divided into single channel and multiple-channel. The multiple-channel flow display can be equipped with multiple MFCs/MFMs, which can work individually.
产品名称

D08-8C

  The flow display and the flow integrating instrument are used for providing Mass Flow Controller (MFC) and Mass Flow Meter (MFM) with working power supply, operation control, flow setting, flow digits display, flow accumulation etc, which are divided into single channel and multiple-channel. The multiple-channel flow display can be equipped with multiple MFCs/MFMs, which can work individually.
产品名称

CS200

CS200 MFCs with advanced sensor and temperature compensation technology can achieve ±1%S.P. accuracy and a low temperature coefficient. In addition, CS200 MFCs with the advanced control system average an 800ms response time for all set point changes, minimizing any system errors in the process.
产品名称

CS300

Sevenstar releases the new generation CS300 MFC for semiconductor marketing. Based on CS technology platform, CS300 is the latest generation designed especially for large scaled IC equipments byCS300 is the latest generation designed especially for large scaled IC equipments byCS300 is the latest generation designed especially for large scaled IC equipments byCS300 MFC has the DF based pressure compensation algorithm, improved surface finishing and Specification comply with SEMI standard, also 1.125" IGS W -seal and C-seal interface are available.
产品名称

CS100

CS100 MFCs derive from the CS series, sharing the same technologies, Constant-power Sensor, Digital Sensor Balance and Valve Correct Pedestal Technology. CS100 can be customized to specific requirements. Additionally with Customer Ground Correction (CGC) function CS100 is flexible in different operating environments and eliminate the bad influence to accuracy because of the improper connecting of ground wires.
产品名称

CS230

CS230 MFCs offer a more accurate solution for high flow, whose full scale could be 300 slm N2. The innovational control algorithm in the CS230 MFC improves the response time within 2seconds by either digital or analog control mode. The characteristics of the low zero drift and less temperature coefficient will help this product to minimize the error and achieve more accuracy. Moreover, the DeviceNetTM (by ODVA), RS485 protocols are available in the communication.
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Beijing Sevenstar Flow Co., LTD.

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