The gas path plate is the solution of the gas path conveying system developed by the Aurasky flowmeter. Through the design, processing and testing of the gas path schematic diagram, the product realizes the pressure regulation, purity filtration, flow control and other functions of various process gases with diaphragm valve, pressure regulating valve, pressure sensor, filter, MFC and other parts. At present, the traditional VCR type gas path plate and gas are commonly used in the market The integrated gas system, i.e. IGS gas path plate, is capable of undertaking both gas path plate businesses and Aurasky flowmeter.
With the development of semiconductor field, higher requirements are put forward for miniaturization of parts and components. The traditional VCR gas circuit disk is difficult to meet the requirements. IGS type gas circuit disk emerges as the times require. It has the characteristics of direct gas transportation, small volume, easy installation and maintenance, which is the development direction of future gas transmission system; After years of research and development experience of MFC, the IGS gas path plate of the Aurasky flowmeter has the advantages of high sealing, high precision and high integration, and can rely on the special gas laboratory established by the Aurasky flowmeter to research and measure the special gas, so as to ensure the high accuracy of the special gas control of the IGS gas path plate.
