Dr. Mou Changhua was invited to attend the 13th International Vacuum Congress to share a report on the technical development of flowmeters in the vacuum industry

　　Dr. Mu Changhua from Beijing Sevenstar Flow Meter was invited to attend the 13th International Conference on Vacuum Science and Engineering Applications. Dr. Mu will deliver a keynote speech on "Technological Development of Mass Flow Controllers in the Vacuum Industry" at the International Exchange Center of Northeastern University on August 14th. Friends from the industry are welcome to attend.

　　Report Abstract

　　The control of gas flow is an important part of the vacuum industry. With the continuous development of vacuum equipment, the requirements for accuracy and stability of gas flow control are becoming increasingly high. The Gas Mass Flow Controller (MFC) is a commonly used gas flow control device in the vacuum industry. With the continuous development of industry demands, its technology continues to expand and innovate. This paper focuses on introducing the technological developments of gas mass flow controllers, including temperature adaptability technology, equipment ground adaptability technology, and communication technology. Gas mass flow controllers will continue to provide strong support for the development of the vacuum industry.

　　Abstract: Gas flow is the one of most important parts in the vacuum industry. With the development of the application, the more accurate and repeatable flow controller is required. The Mass Flow Controller (MFC) has been applied in the vacuum industry for gas flow control. Lots of inventions are developed to meet the application. In this paper, the independent temperature feature, customer ground compensation, and communication method are introduced. MFC technologies will support the development of the vacuum system.

　　Dr. Mu's Profile

　　Mu Changhua, male, born in August 1976, is a Professor-level Senior Engineer. He graduated from Tsinghua University in 2005 with a Ph.D. in Control Science and Engineering. He is mainly engaged in research and product development in the field of gas flow control and measurement, proposing multiple innovative technologies, and has applied for nearly 20 patents, including 4 international PCT inventions. He has published numerous papers in important domestic and international journals and conferences and has led or participated in multiple national and provincial-level scientific research projects, including major national special projects, winning provincial and ministerial science and technology awards multiple times. He has led the research and development of various gas mass flow controller products, which are widely used in various fields such as vacuum, photovoltaics, and large-scale integrated circuits, achieving sales revenue exceeding 100 million yuan, with products sold to Europe, America, and many other countries and regions.