Sevenstar Flowmeter Showcases New Products at SEMICON 2019

　　On March 20, 2019, SEMICON China 2019 grandly opened at the Shanghai New International Expo Center. Sevenstar flow meters CS100, CS200, CS300, CS230, as well as new products CS500, P100, K1000, K1200, and K1500 were showcased at this exhibition. It attracted a large number of industry experts and scholars to visit and discuss. (Detailed new product introduction at the end of the article)

　　Sevenstar flow meters possess multiple key technologies for gas flow measurement and control. Its MFC products are exported to Europe and America, making it a leader among Chinese flow meter brands. The technical specifications of its CS series digital MFC products meet the requirements for high-end equipment, and have been widely applied in production lines across industries such as semiconductors, photovoltaic solar energy, vacuum coating, and TFT, with cumulative sales exceeding 200,000 units.

　　New Products

　　Sevenstar flow meters always prioritize technological innovation, providing flow measurement and control solutions to customers, and are committed to becoming a leading international supplier of mass flow controller products. To better meet the control demands for gas flow and pressure in the semiconductor field, Sevenstar flow meters developed a series of new products based on customer needs, helping customers improve equipment performance.

　　The CS500 pressure-type gas mass flow controller is primarily developed and produced for the trends in advanced semiconductor technology, suitable for high-end semiconductor large-scale integrated circuit equipment. This product adopts pressure sensor technology, offering advantages such as pressure insensitivity, low zero drift, high control accuracy, and fast response time; it uses piezoelectric valve technology, where piezoelectric ceramics generate bending deformation under voltage to form a control valve, possessing advantages like fast response time, no heat generation, strong driving force, and simple structure, meeting the requirements for semiconductor large-scale integrated circuit manufacturing. The CS500 significantly improves the accuracy and reliability of gas mass flow control and measurement.

　　The P100 reaction chamber pressure controller is the latest product developed by Sevenstar flow meters. This product is used to stabilize the pressure inside the chamber, ensuring uniform deposition of gas molecules and achieving consistency in wafer film thickness. They play an important role in the semiconductor field and vacuum coating fields. The P100 product is mainly made of 316L stainless steel and polytetrafluoroethylene (PTFE) materials, with the gas-contacting parts made of PTFE material to improve the product's corrosion resistance and extend its service life. It uses a stepper motor to control the butterfly valve combined with a PID closed-loop control algorithm, and an independently developed central control unit, adjusting the pressure inside the chamber by changing the valve opening.

　　The K1000(M) product is a newly launched multi-gas, multi-range digital product from Sevenstar flow meters, allowing users to conveniently change gas types and flow rates at the client end, minimizing inventory for users; this product adopts Progressive PID technology, with a response speed of ≤1 second across the full range; its flow sensor uses Hastelloy alloy to improve corrosion resistance against chlorine-like gases; the product supports 0～5VDC analog signals and digital signals, and allows setting alarms and monitoring MFC internal information via dedicated software.

　　K1200 and K1500 products are digital high-flow products introduced by Sevenstar flow meters, with a maximum flow rate of up to 500 SLM for nitrogen, and capable of digital/analog control modes; the product's response time across the full range does not exceed 3 seconds, offering higher flow accuracy and minimizing system errors generated during use. The product supports DeviceNet and RS485 communication protocols.