On May 16, 2020, Integrated Circuit Industrial Chain Coordination and Innovation Development Exchange Conference was held in two major conference venues, i.e., Beijing and Shanghai. The 3rd Integrated Circuit Industry Innovation Award was presented in the conference. The “IC Innovation Award” is established to encourage the innovation in IC technology, industrialization of achievement, and cooperation between upstream and downstream of the industrial chain, thus reflecting the idea of the Alliance, i.e., promoting the cooperation in the whole industrial chain. The technology innovation award was presented to the “CS300 Pressure Insensitive Gaseous Mass Flow Controller” manufactured by Beijing Aurasky Flow Co., Ltd. (Hereinafter referred to as “Aurasky”).

         　　For many years, Aurasky has been devoted to pushing forward the localization of IC core components, aiming to provide high-quality gaseous flow measurement and controlling products to the enterprises that producing IC equipment; the CS300 Pressure Insensitive Gaseous Mass Flow Controller is such a product which has been widely used in batches in the large-scale integrated circuit industry .

       　　It is difficult to produce a good mass flow controller applicable to the IC industry, which should have a high precision and stability. To produce a pressure insensitive gaseous mass flow controller is even more difficult, which involves a high technical barrier and China has to buy insensitive gaseous mass flow controllers of foreign makes to use in our IC industry for a long time; to change this condition, the R&D team of Aurasky made a deep investigation on the process requirements of the customers and cut in from the aspects of product design structure, measurement and control algorithms, etc. Through countless suppositions, re-designing, strict screening of raw materials and careful tests of components, CS300 Pressure Insensitive Gaseous Mass Flow Controller was eventually manufactured successfully. It adopts the full metallic sealing structure, thermal sensor measurement technology and pressure compensation algorithm, and is able to precisely measure and control the controlled gas in a precise manner, thus satisfying the requirements of the semi-conductor industry. In addition, it is of great significance in terms of application in R&D and production of multiple fields including the process of semi-conductor and IC. The successful development of CS300 Pressure Insensitive Gaseous Mass Flow Controller has filled in the gap in this technology field in China. The technical specifications of this product have reached the same level of its foreign counterparts, which makes it very competitive in the market.

　　　　For 41 years, Aurasky has been engaged in the R&D and manufacturing of equipment for gaseous flow measurement and control. From R&D to industrialization, Aurasky has achieved the sales of more than 350 thousand controllers in various industries since the first analog mass flow controller was produced by Aurasky. Thanks to its pragmatism, Aurasky has got through the difficult “seeding” period and devoted itself into providing high-quality products to the industry by hard working and continuous self-breakthrough. We deem the winning of the 3rd “IC Innovation Award” as not only a praise but also an encouragement. In the future, more technology break-through tasks are waiting for us, which we take as a high mountain to climb. One grain of millet is planted in spring, and ten thousand seeds are harvested in autumn. In the future with infinite expectations, Aurasky will meet the challenges with great enthusiasm.