PC100
Features
1. Pressure sensing technology based on PTS (pressure, temperature, space)
P. Customized sensing technology, up to 0.1ms
T. Pressure (P) - temperature (T) two parameter characteristic temperature compensation technology
S. Cavity structure design technology of integrated sensor
Based on PTS technology, the PC100-D can achieve temperature compensation which can be calculated with the established pressure -p and temperature- t data template through the optimization of pressure and temperature parameters. On the other hand, to make the data measurement more accurate, improving the installation position of the sensor was used to reduce the volume of the detection cavity;
2. Pressure control technology based on AI
a. Dynamic pressure data model
b. AI online learning rapid recognition
c. Automatic switch FF-P (fixed flow pressure fluctuation) and FP-F (fixed pressure flow fluctuation) modes
Through the establishment of pressure fluctuation data model, fixed flow pressure fluctuation and fixed pressure flow fluctuation modes can be quickly recognized. According to different modes, PC-100 D can adjust the pressure PID parameters with the pre Increase or decrease of the valve voltage, and the strategy has the characteristics of fast response and stable control.
3. All metal corrosion resistance technology
a. All metal seal structure design
b. Special metal surface treatment (passivation)
Embedded fluorine lined proportional pressure regulating valve technology is applied. The sealing structure of the valve is mainly made of 316L stainless steel and PTFE. For the part exposed to gas, PTFE material can improve the service life of the product and is suitable for various types of corrosive gas, and the sealing performance is superior to the previous metal sealing;
Specification
Pressure Type |
Absolute |
Pressure Full Scale Ranges |
1000Torr,1200mbar |
Proof Pressure |
3MPa |
Orifice Full Scale Ranges |
2、3、5SLM |
Control Modes |
Upstream |
Temperature drift |
Zero:±0.02% of FS/℃; Span:±0.04% of Reading/℃ |
Pressure Resolution |
0.1 Torr |
Pressure Control Accuracy |
±1.0% of Reading(≥10%FS); ±0.2% of FS (<10%FS) |
Typical Response Time |
< 1.0 second |
Operating Temperature Range |
10 ℃ to 50 ℃ |
Mechanical interface |
1/4" Compression Fitting、1/4VCR M |
Valve Type |
Normally Closed |
Leak Integrity,External |
< 1 x 10-10(scc/sec He) |
Leak Integrity,Through closed valve |
< 1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere) |
Power supply |
+15 to +24 VDC(< 4 watts) |
Electrical interface |
DB-9 M |
Message
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