CS200 Mass Flow Controller & Flow Meter

The CS200 Gas Mass Flow Controller adopts advanced sensors and temperature compensation technology, thus the product's accuracy can reach within 1% of the set value, and its low temperature coefficient ensures the product adapts to different ambient temperatures. Meanwhile, the product uses a high-speed control algorithm to make the overall flow meter's response time more outstanding. Across the full range, the CS200C product can reach the set flow in as fast as 800ms. The response time minimizes system errors generated during use, making the required flow more precise.

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Product Description

Advantages

• Adopts the constant power sensor principle, with corresponding compensation for temperature changes, fundamentally suppressing the zero-drift phenomenon of the flow meter and ensuring sensor linearity.

• CS200C products use specialized metal surface treatment technology, with all metal materials in contact with gas being 316LVV. The metal surface roughness of CS200C products can reach below 10RA, and CS200D products can reach 25RA.

• CS200 products are strictly manufactured in accordance with SEMI standards, and their dimensions comply with internationally accepted SEMI standards.

• CS200 series products support ±8V~±16V dual power supply, +14V~+28V single power supply; digital and analog input/output.

• Products support RS485, DeviceNet, Profibus, and EtherCAT communication methods.

• Features multi-gas, multi-range function, auto-zero function, alarm function, soft start function, delay function, and powerful free client software.

Technical Parameters

CS200
Type	CS200-A		CS200-C		CS200-D		CS210-A		CS210-D
Valve Type	Normally Open (100 SCCM≤Flow Specification≤5 SLM)	None	Normally Open (100 SCCM≤Flow Specification≤5 SLM)	None	Normally Open (100 SCCM≤Flow Specification≤5 SLM)	None	Normally Open (Flow Specification≤30SLM)	None	Normally Open Or Normally Closed	None
	Or Normally Closed		Or Normally Closed		Or Normally Closed		Or Normally Closed		Or Normally Closed
Flow Specification (N2)	(0～5,10,20,30,50,100,200,300,500) SCCM		(0～2,3,5,10,20,30,50,100,200,300,500) SCCM				(0～5,10,20,30,50,100,200,300,500) SCCM		(0～2,3,5,10,20,30,50,100,200,300,500) SCCM
	(0～1,2,3,5,10,20,30,50) SLM		(0～1,2,3,5,10,20,30) SLM				(0～1,2,3,5,10,20,30,50) SLM		(0～1,2,3,5,10,20,30) SLM
Accuracy	±1.0% S.P. (≥35% F.S.)
	±0.35% F.S.(＜35% F.S.)
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response Time	≤ 1sec		≤ 0.8sec				1sec		≤ 0.8sec
Operating Differential Pressure Range	0.05～0.35MPa Flow Spec ≤10SLM 0.1～0.35MPa 10＜Flow Spec ≤30SLM 0.2～0.45MPa 30＜Flow Spec ≤50SLM	＜0.02 MPa	0.05～0.35MPa Flow Spec ≤10SLM 0.1～0.35MPa Flow Spec ＞10SLM	＜0.02 MPa	0.05～0.35MPa Flow Spec ≤10SLM 0.1～0.35MPa Flow Spec ＞10SLM	＜0.02 MPa	0.05～0.35MPa Flow Spec ≤10SLM 0.1～0.35MPa 10＜Flow Spec ≤30SLM 0.2～0.45MPa 30＜Flow Spec ≤50SLM	＜0.02 MPa	0.05～0.35MPa Flow Spec ≤10SLM 0.1～0.35MPa Flow Spec ＞10SLM	＜0.02 MPa





Maximum Operating Pressure	0.45MPa
Temperature Coefficient	Zero Point: ≤±0.05% F.S./℃;		Zero Point: ≤±0.02% F.S./℃;				Zero Point: ≤±0.05% F.S./℃;		Zero Point: ≤±0.02% F.S./℃;
	During Regulation: ≤±0.1% F.S./℃ Flow Spec ≤30SLM		During Regulation: ≤±0.05% F.S./℃				During Regulation: ≤±0.1% F.S./℃ Flow Spec ≤30SLM		During Regulation: ≤±0.05% F.S./℃
	During Regulation: ≤±0.2% F.S./℃ Flow Spec ＞30SLM						During Regulation: ≤±0.2% F.S./℃ Flow Spec ＞30SLM
Pressure Resistance	3MPa
Leak Rate	1×10 ^-10 Pa·m3/ sec He		1×10 ^-11 Pa·m3/ sec He				1×10 ^-10 Pa·m3 / sec He		1×10 ^-11 Pa·m3 / sec He
Sealing Material	Fluororubber		Metal Seal				Fluororubber		Metal Seal
Operating Ambient Temperature	(5～45)℃		(0～50)℃				(5～45)℃		(0～50)℃
Input Signal	Digital: RS485 or DeviceNet or ProfiBus or EtherCAT Analog: (0～5)VDC or (4～20)mA or (0～20)mA	None	Digital: RS485 or DeviceNet or ProfiBus or EtherCAT Analog: (0～5)VDC or (4～20)mA or (0～20)mA	None	Digital: RS485 or DeviceNet or ProfiBus or EtherCAT Analog: (0～5)VDC or (4～20)mA or (0～20)mA	None	Digital: RS485 or EtherCAT	None	Digital: RS485 or EtherCAT	None





Output Signal	Digital: RS485 or DeviceNet or ProfiBus or EtherCAT						Digital: RS485 or EtherCAT		Digital: RS485 or EtherCAT
	Analog: (0～5)VDC or (4～20)mA or (0～20)mA
Power Supply	±8 ～ ±16 VDC (Bipolar) or +14 ～ +28 VDC (Unipolar)						+14 ～ +28 VDC (Unipolar)		+20.4 ～ +26.4 VDC
Surface Chemical Composition	Normal state		Cr/Fe ratio ≥2.0, CrO thickness ≥ 20 (Angstroms)		Normal state		Normal state		Normal state
Surface roughness	25 Ra		10 Ra		25 Ra		25 Ra		25 Ra
Standard connector type	Double ferrule φ6; Double ferrule 1/4´´; Double ferrule 3/8´´; VCR1/4´´ male connector; Double ferrule φ3;		Double ferrule φ3; Double ferrule φ6; Double ferrule 1/4; VCR1/4 male connector;				Double ferrule φ6; Double ferrule 1/4´´; Double ferrule 3/8´´; VCR1/4´´ male connector; Double ferrule φ3;		Double ferrule φ3; Double ferrule φ6; Double ferrule 1/4; VCR1/4 male connector
	Double ferrule 1/8´´; VCO 1/4";φ6(inner)x1 hose connector; φ5(inner)x1.5 hose connector;		1.5´´ C-type sealed connector; 1.5´´ W-type sealed connector;				Double ferrule 1/8´´; VCO 1/4";φ6(inner)x1 hose connector; φ5(inner)x1.5 hose connector;		1.5´´ C-type sealed connector; 1.5´´ W-type sealed connector
	φ4(inner)x1 hose connector; double ferrule φ10mm; A-type sealed connector;						φ4(inner)x1 hose connector; double ferrule φ10mm; A-type sealed connector;
Power connector type	D-type 9-pin male connector; D-type 15-pin male connector; DeviceNet connector; ProfiBus connector; Analog connector; EtherCAT connector						D-type 9-pin male connector; EtherCAT connector
Weight	1 Kg	0.8Kg	1.2Kg	1Kg	1.2Kg	1Kg	1 Kg	0.8Kg	1.2 Kg	1Kg

None

SC139 CS200A 中文使用手册2023.12.pdf

SC221 CS210C 中文使用手册2022.11.pdf

SC141 CS200C 中文使用手册2023.12（不涉密）.pdf

SC143 CS200D 中文使用手册2023.12（不涉密）.pdf

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