
CS200 Mass Flow Controller & Flow Meter
The CS200 Gas Mass Flow Controller adopts advanced sensors and temperature compensation technology, thus the product's accuracy can reach within 1% of the set value, and its low temperature coefficient ensures the product adapts to different ambient temperatures. Meanwhile, the product uses a high-speed control algorithm to make the overall flow meter's response time more outstanding. Across the full range, the CS200C product can reach the set flow in as fast as 800ms. The response time minimizes system errors generated during use, making the required flow more precise.
Product Description
Advantages
• Adopts the constant power sensor principle, with corresponding compensation for temperature changes, fundamentally suppressing the zero-drift phenomenon of the flow meter and ensuring sensor linearity.
• CS200C products use specialized metal surface treatment technology, with all metal materials in contact with gas being 316LVV. The metal surface roughness of CS200C products can reach below 10RA, and CS200D products can reach 25RA.
• CS200 products are strictly manufactured in accordance with SEMI standards, and their dimensions comply with internationally accepted SEMI standards.
• CS200 series products support ±8V~±16V dual power supply, +14V~+28V single power supply; digital and analog input/output.
• Products support RS485, DeviceNet, Profibus, and EtherCAT communication methods.
• Features multi-gas, multi-range function, auto-zero function, alarm function, soft start function, delay function, and powerful free client software.
Technical Parameters
CS200 | ||||||||||
Type | CS200-A | CS200-C | CS200-D | CS210-A | CS210-D | |||||
Valve Type | Normally Open (100 SCCM≤Flow Specification≤5 SLM) | None | Normally Open (100 SCCM≤Flow Specification≤5 SLM) | None | Normally Open (100 SCCM≤Flow Specification≤5 SLM) | None | Normally Open (Flow Specification≤30SLM) | None | Normally Open Or Normally Closed |
None |
Or Normally Closed | Or Normally Closed | Or Normally Closed | Or Normally Closed | Or Normally Closed | ||||||
Flow Specification (N2) | (0~5,10,20,30,50,100,200,300,500) SCCM | (0~2,3,5,10,20,30,50,100,200,300,500) SCCM | (0~5,10,20,30,50,100,200,300,500) SCCM | (0~2,3,5,10,20,30,50,100,200,300,500) SCCM | ||||||
(0~1,2,3,5,10,20,30,50) SLM | (0~1,2,3,5,10,20,30) SLM | (0~1,2,3,5,10,20,30,50) SLM | (0~1,2,3,5,10,20,30) SLM | |||||||
Accuracy | ±1.0% S.P. (≥35% F.S.) | |||||||||
±0.35% F.S.(<35% F.S.) | ||||||||||
Linearity | ±0.5% F.S. | |||||||||
Repeatability | ±0.2% F.S. | |||||||||
Response Time | ≤ 1sec | ≤ 0.8sec | 1sec | ≤ 0.8sec | ||||||
Operating Differential Pressure Range | 0.05~0.35MPa Flow Spec ≤10SLM 0.1~0.35MPa 10<Flow Spec ≤30SLM 0.2~0.45MPa 30<Flow Spec ≤50SLM | <0.02 MPa | 0.05~0.35MPa Flow Spec ≤10SLM 0.1~0.35MPa Flow Spec >10SLM | <0.02 MPa | 0.05~0.35MPa Flow Spec ≤10SLM 0.1~0.35MPa Flow Spec >10SLM | <0.02 MPa | 0.05~0.35MPa Flow Spec ≤10SLM 0.1~0.35MPa 10<Flow Spec ≤30SLM 0.2~0.45MPa 30<Flow Spec ≤50SLM | <0.02 MPa | 0.05~0.35MPa Flow Spec ≤10SLM 0.1~0.35MPa Flow Spec >10SLM | <0.02 MPa |
Maximum Operating Pressure | 0.45MPa | |||||||||
Temperature Coefficient | Zero Point: ≤±0.05% F.S./℃; | Zero Point: ≤±0.02% F.S./℃; | Zero Point: ≤±0.05% F.S./℃; | Zero Point: ≤±0.02% F.S./℃; | ||||||
During Regulation: ≤±0.1% F.S./℃ Flow Spec ≤30SLM | During Regulation: ≤±0.05% F.S./℃ | During Regulation: ≤±0.1% F.S./℃ Flow Spec ≤30SLM | During Regulation: ≤±0.05% F.S./℃ | |||||||
During Regulation: ≤±0.2% F.S./℃ Flow Spec >30SLM | During Regulation: ≤±0.2% F.S./℃ Flow Spec >30SLM | |||||||||
Pressure Resistance | 3MPa | |||||||||
Leak Rate | 1×10 -10 Pa·m3/ sec He | 1×10 -11 Pa·m3/ sec He | 1×10 -10 Pa·m3 / sec He | 1×10 -11 Pa·m3 / sec He | ||||||
Sealing Material | Fluororubber | Metal Seal | Fluororubber | Metal Seal | ||||||
Operating Ambient Temperature | (5~45)℃ | (0~50)℃ | (5~45)℃ | (0~50)℃ | ||||||
Input Signal | Digital: RS485 or DeviceNet or ProfiBus or EtherCAT Analog: (0~5)VDC or (4~20)mA or (0~20)mA | None | Digital: RS485 or DeviceNet or ProfiBus or EtherCAT Analog: (0~5)VDC or (4~20)mA or (0~20)mA | None | Digital: RS485 or DeviceNet or ProfiBus or EtherCAT Analog: (0~5)VDC or (4~20)mA or (0~20)mA | None | Digital: RS485 or EtherCAT | None | Digital: RS485 or EtherCAT | None |
Output Signal | Digital: RS485 or DeviceNet or ProfiBus or EtherCAT | Digital: RS485 or EtherCAT | Digital: RS485 or EtherCAT | |||||||
Analog: (0~5)VDC or (4~20)mA or (0~20)mA | ||||||||||
Power Supply | ±8 ~ ±16 VDC (Bipolar) or +14 ~ +28 VDC (Unipolar) | +14 ~ +28 VDC (Unipolar) | +20.4 ~ +26.4 VDC | |||||||
Surface Chemical Composition | Normal state | Cr/Fe ratio ≥2.0, CrO thickness ≥ 20 (Angstroms) | Normal state | Normal state | Normal state | |||||
Surface roughness | 25 Ra | 10 Ra | 25 Ra | 25 Ra | 25 Ra | |||||
Standard connector type | Double ferrule φ6; Double ferrule 1/4´´; Double ferrule 3/8´´; VCR1/4´´ male connector; Double ferrule φ3; |
Double ferrule φ3; Double ferrule φ6; Double ferrule 1/4; VCR1/4 male connector; |
Double ferrule φ6; Double ferrule 1/4´´; Double ferrule 3/8´´; VCR1/4´´ male connector; Double ferrule φ3; |
Double ferrule φ3; Double ferrule φ6; Double ferrule 1/4; VCR1/4 male connector |
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Double ferrule 1/8´´; VCO 1/4";φ6(inner)x1 hose connector; φ5(inner)x1.5 hose connector; |
1.5´´ C-type sealed connector; 1.5´´ W-type sealed connector; | Double ferrule 1/8´´; VCO 1/4";φ6(inner)x1 hose connector; φ5(inner)x1.5 hose connector; |
1.5´´ C-type sealed connector; 1.5´´ W-type sealed connector | |||||||
φ4(inner)x1 hose connector; double ferrule φ10mm; A-type sealed connector; |
φ4(inner)x1 hose connector; double ferrule φ10mm; A-type sealed connector; |
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Power connector type | D-type 9-pin male connector; D-type 15-pin male connector; DeviceNet connector; ProfiBus connector; Analog connector; EtherCAT connector |
D-type 9-pin male connector; EtherCAT connector |
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Weight | 1 Kg | 0.8Kg | 1.2Kg | 1Kg | 1.2Kg | 1Kg | 1 Kg | 0.8Kg | 1.2 Kg | 1Kg |