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CS200

CS200 MFCs with advanced sensor and temperature compensation technology can achieve ±1%S.P. accuracy and a low temperature coefficient. In addition, CS200 MFCs with the advanced control system average an 800ms response time for all set point changes, minimizing any system errors in the process.
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Product description
Parameters

　Features

　　1. High Accuracy and Fast Response

　　The accuracy of the CS200 MFC has been improved to ±1.0% of S.P., and the most advanced models have a reduced response time of less than 0.8 sec.

　　2. Low Zero Drift and Temperature Coefficient

　　The invention of new sensor technology enables the CS200 MFC to maintain stability and withstand temperature fluctuations. Without an auto-zero amplifier, the expected zero drift is less than 0.6%F.S./year, and the temperature coefficient is less than 0.02%F.S./℃(zero)，0.05%F.S./ ℃ (span).

　　3. Metal-Sealed Models and High Purity Feature

　　The wetted flow path of-the-the-line CS200 MFC is constructed from surface-passivated stainless steel. All CS200 MFCs are assembled in Sevenstar’s ultraclean Class 100-class cleanrooms in accordance with both SEMI and ISO 9001 standards.

　　4. Compatible Interfaces

　　The CS200 MFC is compatible with the following interfaces, which may be selected by the customer:±8V-±16V double-end power supply and +14V-+28V single–end power supply; digital or analog signal input and output; SEMI standard mechanical dimensions; and RS-485 or DeviceNet communications module.

　　5. Miscellaneous Functions

　　Powerful customer software comes standard with each model, while additional functions such as multi-gas，multi-range，auto-zero, alarms, soft start, and delay are available as customer selections.

 

　　Specification

 

 

CS200

Type

CS200A

CS200C

CS200D

Full scale range (N2)

( 0～5,10,20,30,50,100,200,300,500)SCCM
( 0～1,2,3,5,10,20,30,50)SLM

( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM
( 0～1,2,3,5,10,20,30)SLM

Accuracy

±1.0% S.P. (≥35% F.S.)                                                        ±0.35% F.S.?(＜35% F.S.)

Linearity

±0.5% F.S.

Repeatability

±0.2% F.S.

Response Time

≤1sec

≤0.8 sec (SEMI E17-0600)

Valve Rest Position

Normally Closed    or

Normally Open（100 sccm≤F.S.≤5 slm）

No Valve

Normally Closed    or

Normally Open（100 sccm≤F.S.≤5 slm）

No Valve

Normally Closed    or

Normally Open（100 sccm≤F.S.≤5 slm）

No Valve

Differential Pressure

0.05～0.35MPa （Flow≤10slm）
0.1～0.35MPa（10slm＜Flow≤30slm）
0.2～0.45MPa  （Flow＞30slm）

＜0.02MPa

(0.05～0.35) MPa（≤10slm）
(0.1～0.35) MPa（＞10slm）

＜0.02MPa

(0.05～0.35) MPa（≤10slm）
(0.1～0.35) MPa（＞10slm）

＜0.02MPa

Maximum Operating Pressure

0.45MPa

Temperature
Coefficient

Zero:≤±0.05% F.S./℃;
Span: ≤±0.1% F.S./℃（Flow≤30slm）
Span: ≤±0.2% F.S./℃（Flow>30slm）

Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃

Proof Pressure

3MPa   (435pisg)

Zero Drift

＜0.6%F.S. per year without autozero

Leak integrity

1×10-9 atm·cc / sec He

1×10-10atm·cc / sec He

Wetted Materials

Viton;

Metal?(Stainless Steel V/V, 5Ra)

Metal

Surface Chemistry

——

Cr/Fe ratio ＞2.0; CrO thickness ＞20 Angstroms

Surface Finish

25Ra

10Ra

25Ra

Operation Temperature

（5～45）℃

（0～50）℃

Input Signal

Digital: RS485  or  ProfiBus  
  or   DeviceNetTM
Analog:(0～5)VDC or (4～20)mA or(0～20)mA

N/A

Digital: RS485 or ProfiBus  or DeviceNetTM
Analog:(0～5)VDC or (4～20)mA or (0～20)mA

N/A

Digital:RS485 or ProfiBus  or DeviceNetTM
Analog:(0～5)VDC or (4～20)mA?or (0～20)mA

N/A

Output Signal

Digital: RS485 or DeviceNetTMor ProfiBus or EtherCAT       Analog:(0～5)VDC or (4～20)mA or (0～20)mA

Power Supply

±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA)

Electronic Connector

9 pin male sub-D ，15 pin male sub-D ，DeviceNetTM，ProfiBus ，Analog

Fittings

VCR1/4” M； VCO1/4” M；
Compression FittingΦ10;Compression FittingΦ6；
Compression Fitting 3/8”;  Compression Fitting1/4”；
Compression Fitting1/8”; Compression FittingΦ3；
Ф6(inner)×1hose;ф5(inner)×1.5hose;ф4(inner)×1hose;
 A-sael ;

VCR1/4” M;
Compression FittingΦ6,
Compression FittingΦ3,
Compression Fitting1/4”，
W-seal，
C-seal

Weight

1kg

0.8kg

1.2kg

1kg

1.2kg

1kg

 

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