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DS300 Mass Flow Controller

The DS300 Pressure-based Gas Mass Flow Controller is a gas mass flow controller developed for the semiconductor industry and suitable for semiconductor equipment, used in processes such as etching and sputtering of semiconductor devices. The DS300 adopts pressure-based flow sensor technology and high-precision piezoelectric valve control technology, giving the product features such as low zero drift, high accuracy, fast response speed, and pressure insensitivity. All gas-contacting surfaces of the product are stainless steel metal, and the metal surface condition meets SEMI standard requirements.

Product Description


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