
DS300 Mass Flow Controller
The DS300 Pressure-based Gas Mass Flow Controller is a gas mass flow controller developed for the semiconductor industry and suitable for semiconductor equipment, used in processes such as etching and sputtering of semiconductor devices. The DS300 adopts pressure-based flow sensor technology and high-precision piezoelectric valve control technology, giving the product features such as low zero drift, high accuracy, fast response speed, and pressure insensitivity. All gas-contacting surfaces of the product are stainless steel metal, and the metal surface condition meets SEMI standard requirements.
Product Description
Advantages
• High control accuracy, precision up to ±1.0% S.P.(≥10%F.S.).
• Fast response speed, response time ≤ 0.5sec.
• Adopts flow sensor technology based on pressure principle, making the product pressure-insensitive and adaptable to large fluctuations in air source pressure.
• DS300 uses effective mechanical processing and surface treatment technologies to solve the problem of deep small holes that cannot be or are difficult to electropolish (EP), achieving electrochemical polishing treatment of stainless steel small holes, deep blind holes, and cross holes with relatively small aperture (<1mm) and relatively large depth-to-diameter ratio (>10), fully meeting SEMI standard requirements.
Technical Parameters
DS300C |
|
Type |
DS300C |
Valve Type |
Normally Closed |
Flow Specification (N2) |
(0~30,50,100,200,300,500) SCCM |
Accuracy |
±1% S.P. (≥10% F.S.) |
Linearity |
±0.5% F.S. |
Repeatability |
±0.2% F.S. |
Response Time |
≤ 0.5sec |
Inlet Pressure |
240~450KPa Flow Specification≤5SLM |
Outlet Pressure |
≤1.2KPa Flow Specification≤5SLM |
Temperature Coefficient |
Zero Point: ≤±0.02% F.S./℃; |
Withstanding Pressure |
3 MPa |
Leak Rate |
1×10 -11 Pa·m 3 / sec He |
Sealing Material |
Metal Seal |
Maximum Operating Pressure |
0.45MPa |
Operating Ambient Temperature |
(10~45)℃ |
Input Signal |
Digital: RS485 or DeviceNet |
Output Signal |
Digital: RS485 or DeviceNet |
Zero Drift |
Without Zero Correction: <0.6%F.S./year |
Power Supply |
±8~±16 VDC (Bipolar) or +14~+28 VDC (Unipolar) |
Surface Chemical Composition |
Cr/Fe Ratio ≥2.0; |
Surface Roughness |
Ra 5μinch |
Standard Connector Type |
VCR1/4 Male Connector; |
Power Connector Type |
D-type 9-pin Male Connector; |
Weight |
1.2Kg |