IGS Metal Diaphragm Valve

High-purity metal diaphragm valves for IGS, using secondary melted SUS316L as the valve body material, offer multiple interface options (C-seal and W-seal).

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Product Description

Advantages

• Best suited for high-purity process gas supply lines
• Valve body made of secondary melted SUS316L, safe and reliable
• W-seal and C-seal available

Technical Parameters

Dimensions	SEMI F83-0304 1.125” W seal 2 Port	SEMI F84-0304 1.125” W seal 3 Port	SEMI F86-0304 1.125” C seal 2 Port
Cv value	0.24	0.24	0.27
Maximum Operating Pressure	1.0MPa(G)
Operating Temperature Range	-10～80℃
External Leakage	≦3x10 ^-12 Pa・m ³ /sec Helium
Seat Leakage	≦3x10 ^-10 Pa・m ³ /sec Helium

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