
IGS Metal Diaphragm Valve
High-purity metal diaphragm valves for IGS, using secondary melted SUS316L as the valve body material, offer multiple interface options (C-seal and W-seal).
Product Description
Advantages
• Best suited for high-purity process gas supply lines
• Valve body made of secondary melted SUS316L, safe and reliable
• W-seal and C-seal available
Technical Parameters
Dimensions |
SEMI F83-0304 |
SEMI F84-0304 |
SEMI F86-0304 |
Cv value |
0.24 |
0.24 |
0.27 |
Maximum Operating Pressure |
1.0MPa(G) |
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Operating Temperature Range |
-10~80℃ |
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External Leakage |
≦3x10 -12 Pa・m 3 /sec Helium |
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Seat Leakage |
≦3x10 -10 Pa・m 3 /sec Helium |
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