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Gas path system

The gas panel is a solution for gas delivery systems developed by Huacheng Electronics. Through the design, processing, and testing of gas path schematics, this product achieves functions such as pressure regulation, purity filtration, and flow control for various process gases using components like diaphragm valves, pressure regulators, pressure sensors, filters, and MFCs. Currently, the commonly used products in the market are traditional VCR type gas panels and Integrated Gas Systems (IGS), also known as IGS gas panels. Huacheng Electronics is capable of undertaking business for both types of gas panels.

  With the development of the semiconductor industry, higher demands have been placed on component miniaturization. Traditional VCR gas panels struggle to meet these demands, leading to the emergence of IGS type gas panels. They feature direct gas flow, small size, and easy installation and maintenance, representing the future direction of gas delivery systems. Benefiting from years of accumulated MFC R&D experience, Huacheng Electronics' IGS gas panels boast high sealing performance, high precision, and high integration. Furthermore, by utilizing the special gas laboratory established by Huacheng Electronics, special gases can be researched and measured, ensuring the high accuracy of special gas control by IGS gas panels.

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