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Product Description

CS200
Type	CS200-A		CS200-C		CS200-D		CS210-A		CS210-D
Valve Type	Normally Open (100 SCCM≤Flow Range≤5 SLM)	None	Normally Open (100 SCCM≤Flow Range≤5 SLM)	None	Normally Open (100 SCCM≤Flow Range≤5 SLM)	None	Normally Open (Flow Range≤30SLM)	None	Normally Open or Normally Closed	None
	or Normally Closed		or Normally Closed		or Normally Closed		or Normally Closed		or Normally Closed
Flow Range (N2)	(0～5,10,20,30,50,100,200,300,500) SCCM		(0～2,3,5,10,20,30,50,100,200,300,500) SCCM				(0～5,10,20,30,50,100,200,300,500) SCCM		(0～2,3,5,10,20,30,50,100,200,300,500) SCCM
	(0～1,2,3,5,10,20,30,50) SLM		(0～1,2,3,5,10,20,30) SLM				(0～1,2,3,5,10,20,30,50) SLM		(0～1,2,3,5,10,20,30) SLM
Accuracy	±1.0% S.P. (≥35% F.S.)
	±0.35% F.S.(＜35% F.S.)
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response Time	≤ 1sec		≤ 0.8sec				1sec		≤ 0.8sec
Operating Pressure Difference Range	0.05～0.35MPa Flow Range≤10SLM 0.1～0.35MPa 10＜Flow Range≤30SLM 0.2～0.45MPa 30＜Flow Range≤50SLM	＜0.02 MPa	0.05～0.35MPa Flow Range≤10SLM 0.1～0.35MPa Flow Range＞10SLM	＜0.02 MPa	0.05～0.35MPa Flow Range≤10SLM 0.1～0.35MPa Flow Range＞10SLM	＜0.02 MPa	0.05～0.35MPa Flow Range≤10SLM 0.1～0.35MPa 10＜Flow Range≤30SLM 0.2～0.45MPa 30＜Flow Range≤50SLM	＜0.02 MPa	0.05～0.35MPa Flow Range≤10SLM 0.1～0.35MPa Flow Range＞10SLM	＜0.02 MPa





Maximum Operating Pressure	0.45MPa
Temperature Coefficient	Zero Point: ≤±0.05% F.S./℃;		Zero Point: ≤±0.02% F.S./℃;				Zero Point: ≤±0.05% F.S./℃;		Zero Point: ≤±0.02% F.S./℃;
	During regulation: ≤±0.1% F.S./℃ Flow Range≤30SLM		During regulation: ≤±0.05% F.S./℃				During regulation: ≤±0.1% F.S./℃ Flow Range≤30SLM		During regulation: ≤±0.05% F.S./℃
	During regulation: ≤±0.2% F.S./℃ Flow Range＞30SLM						During regulation: ≤±0.2% F.S./℃ Flow Range＞30SLM
Pressure Resistance	3MPa
Leak Rate	1×10-10Pa·m3/ sec He		1×10-11Pa·m3/ sec He				1×10-10Pa·m3 / sec He		1×10-11Pa·m3 / sec He
Sealing Material	Fluoro Rubber		Metal Seal				Fluoro Rubber		Metal Seal
Operating Ambient Temperature	（5～45）℃		（0～50）℃				（5～45）℃		（0～50）℃
Input Signal	Digital: RS485 or DeviceNet or ProfiBus or EtherCAT Analog: (0～5)VDC or (4～20)mA or (0～20)mA	None	Digital: RS485 or DeviceNet or ProfiBus or EtherCAT Analog: (0～5)VDC or (4～20)mA or (0～20)mA	None	Digital: RS485 or DeviceNet or ProfiBus or EtherCAT Analog: (0～5)VDC or (4～20)mA or (0～20)mA	None	Digital: RS485 or EtherCAT	None	Digital: RS485 or EtherCAT	None





Output Signal	Digital: RS485 or DeviceNet or ProfiBus or EtherCAT						Digital: RS485 or EtherCAT		Digital: RS485 or EtherCAT
	Analog: (0～5)VDC or (4～20)mA or (0～20)mA
Power Supply	±8 ～ ±16 VDC (Bipolar) or +14 ～ +28 VDC (Unipolar)						+14 ～ +28 VDC (Unipolar)		+20.4 ～ +26.4 VDC
Surface Chemical Composition	Normal		Cr/Fe ratio ≥2.0, CrO thickness ≥ 20 (Angstroms)		Normal		Normal		Normal
Surface Roughness	25 Ra		10 Ra		25 Ra		25 Ra		25 Ra
Standard Connector Type	Double ferrule φ6; Double ferrule 1/4''; Double ferrule 3/8''; VCR1/4'' Male Connector; Double ferrule φ3;		Double ferrule φ3; Double ferrule φ6; Double ferrule 1/4; VCR1/4 Male Connector;				Double ferrule φ6; Double ferrule 1/4''; Double ferrule 3/8''; VCR1/4'' Male Connector; Double ferrule φ3;		Double ferrule φ3; Double ferrule φ6; Double ferrule 1/4; VCR 1/4 male connector
	Double ferrule 1/8''; VCO 1/4"; φ6 (ID) x 1 hose connector; φ5 (ID) x 1.5 hose connector;		1.5'' C-type sealed connector; 1.5'' W-type sealed connector;				Double ferrule 1/8''; VCO 1/4"; φ6 (ID) x 1 hose connector; φ5 (ID) x 1.5 hose connector;		1.5'' C-type sealed connector; 1.5'' W-type sealed connector
	φ4 (ID) x 1 hose connector; double ferrule φ10mm; A-type sealed connector;						φ4 (ID) x 1 hose connector; double ferrule φ10mm; A-type sealed connector;
Power connector type	D-type 9-pin male connector; D-type 15-pin male connector; DeviceNet connector; ProfiBus connector; Analog connector; EtherCAT connector						D-type 9-pin male connector; EtherCAT connector
Weight	1 Kg	0.8Kg	1.2Kg	1Kg	1.2Kg	1Kg	1 Kg	0.8Kg	1.2 Kg	1Kg

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