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Product Description

CS200
Type	CS200-A		CS200-C		CS200-D		CS210-A		CS210-D
Valve type	Normally open (100 SCCM≤Flow specification≤5 SLM)	None	Normally open (100 SCCM≤Flow specification≤5 SLM)	None	Normally open (100 SCCM≤Flow specification≤5 SLM)	None	Normally open (Flow specification≤30SLM)	None	Normally open Or normally closed	None
	Or normally closed		Or normally closed		Or normally closed		Or normally closed		Or normally closed
Flow specification (N2)	(0～5,10,20,30,50,100,200,300,500) SCCM		(0～2,3,5,10,20,30,50,100,200,300,500) SCCM				(0～5,10,20,30,50,100,200,300,500) SCCM		(0～2,3,5,10,20,30,50,100,200,300,500) SCCM
	(0～1,2,3,5,10,20,30,50) SLM		(0～1,2,3,5,10,20,30) SLM				(0～1,2,3,5,10,20,30,50) SLM		(0～1,2,3,5,10,20,30) SLM
Accuracy	±1.0% S.P. (≥35% F.S.)
	±0.35% F.S.(＜35% F.S.)
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response time	≤ 1sec		≤ 0.8sec				1sec		≤ 0.8sec
Operating differential pressure range	0.05～0.35MPa Flow specification ≤10SLM 0.1～0.35MPa 10＜Flow specification ≤30SLM 0.2～0.45MPa 30＜Flow specification ≤50SLM	＜0.02 MPa	0.05～0.35MPa Flow specification ≤10SLM 0.1～0.35MPa Flow specification ＞10SLM	＜0.02 MPa	0.05～0.35MPa Flow specification ≤10SLM 0.1～0.35MPa Flow specification ＞10SLM	＜0.02 MPa	0.05～0.35MPa Flow specification ≤10SLM 0.1～0.35MPa 10＜Flow specification ≤30SLM 0.2～0.45MPa 30＜Flow specification ≤50SLM	＜0.02 MPa	0.05～0.35MPa Flow specification ≤10SLM 0.1～0.35MPa Flow specification ＞10SLM	＜0.02 MPa





Maximum operating pressure	0.45MPa
Temperature coefficient	Zero point: ≤±0.05% F.S./℃;		Zero point: ≤±0.02% F.S./℃;				Zero point: ≤±0.05% F.S./℃;		Zero point: ≤±0.02% F.S./℃;
	During adjustment: ≤±0.1% F.S./℃ Flow specification ≤30SLM		During adjustment: ≤±0.05% F.S./℃				During adjustment: ≤±0.1% F.S./℃ Flow specification ≤30SLM		During adjustment: ≤±0.05% F.S./℃
	During adjustment: ≤±0.2% F.S./℃ Flow specification ＞30SLM						During adjustment: ≤±0.2% F.S./℃ Flow specification ＞30SLM
Pressure resistance	3MPa
Leak rate	1×10-10Pa·m3/ sec He		1×10-11Pa·m3/ sec He				1×10-10Pa·m3 / sec He		1×10-11Pa·m3 / sec He
Sealing material	Fluororubber		Metal seal				Fluororubber		Metal seal
Operating ambient temperature	(5～45)℃		(0～50)℃				(5～45)℃		(0～50)℃
Input signal	Digital: RS485 or DeviceNet or ProfiBus or EtherCAT Analog: (0～5)VDC or (4～20)mA or (0～20)mA	None	Digital: RS485 or DeviceNet or ProfiBus or EtherCAT Analog: (0～5)VDC or (4～20)mA or (0～20)mA	None	Digital: RS485 or DeviceNet or ProfiBus or EtherCAT Analog: (0～5)VDC or (4～20)mA or (0～20)mA	None	Digital: RS485 or EtherCAT	None	Digital: RS485 or EtherCAT	None





Output signal	Digital:RS485 or DeviceNet or ProfiBus or EtherCAT						Digital:RS485 or EtherCAT		Digital:RS485 or EtherCAT
	Analog: (0～5)VDC or (4～20)mA or (0～20)mA
Power supply	±8 ～ ±16 VDC (Bipolar) or +14 ～ +28 VDC (Unipolar)						+14 ～ +28 VDC (Unipolar)		+20.4 ～ +26.4 VDC
Surface chemical composition	Normal state		Cr/Fe Ratio ≥2.0, CrO Thickness ≥ 20 (Angstrom)		Normal state		Normal state		Normal state
Surface roughness	25 Ra		10 Ra		25 Ra		25 Ra		25 Ra
Standard connector type	Dual ferrule φ6; Dual ferrule 1/4´´; Dual ferrule 3/8´´; VCR1/4´´ Male connector; Dual ferrule φ3;		Dual ferrule φ3; Dual ferrule φ6; Dual ferrule 1/4; VCR1/4 Male connector;				Dual ferrule φ6; Dual ferrule 1/4´´; Dual ferrule 3/8´´; VCR1/4´´ Male connector; Dual ferrule φ3;		Dual ferrule φ3; Dual ferrule φ6; Double ferrule 1/4; VCR 1/4 male connector
	Double ferrule 1/8´´; VCO 1/4";φ6(inner)x1 hose connector; φ5(inner)x1.5 hose connector;		1.5´´ C-type sealed connector;1.5´´ W-type sealed connector;				Double ferrule 1/8´´; VCO 1/4";φ6(inner)x1 hose connector; φ5(inner)x1.5 hose connector;		1.5´´ C-type sealed connector;1.5´´ W-type sealed connector
	φ4(inner)x1 hose connector;double ferrule φ10mm; A-type sealed connector;						φ4(inner)x1 hose connector;double ferrule φ10mm; A-type sealed connector;
Power connector type	D-type 9-pin male connector; D-type 15-pin male connector; DeviceNet connector; ProfiBus connector; Analog connector; EtherCAT connector						D-type 9-pin male connector; EtherCAT connector
Weight	1 Kg	0.8Kg	1.2Kg	1Kg	1.2Kg	1Kg	1 Kg	0.8Kg	1.2 Kg	1Kg

CS300 Mass Flow Controller & Flowmeter

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