The CS330C、D MFC/MFM incorporate a dual interface, voltage and current as well as RS-485，DeviceNet and ProfiBus digital interfaces. It is possible to operate the instrument completely digitally or it can be operated in analog mode with digital monitoring. CS330C、D series have wide range of power supply(available for ±8 ～ ±16 VDC or +14 ～ +28 VDC). In addition, autoAlarm, change of operating gas and range available through the digital interface. Customer Secondary Development of control and sample software is available through the open protocol.

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Parameters

Specification

CS330C、D
Type	CS330C		CS330D
Valve Rest Position	Normally Closed	No Valve	Normally Closed	No Valve
Full scale range (N₂)	(100,200) SLM
Accuracy	±1.0% S.P. (＞35% F.S.) ±0.35% F.S. (≤35% F.S.)
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response Time	≤ 1 sec
Valve Rest Position	400 ~ 600 KPa	＜0.03MPa	400 ~ 600 KPa	＜0.03MPa
Differential Pressure	Zero: ≤±0.02% F.S./℃；Span：≤±0.1% F.S./℃
Maximum Pressure Working	0.6 MPa
Max Pressure	1 MPa (435pisg)
Leak integrity	5 x 10^-12 Pa·m³/ sec He （5 x 10^-11 atm.cc/sec He）
Wetted Materials	Metal
Operation Temperature	（0～50）℃
Input Signal	Digital: RS485 or DeviceNet or EtherCAT Analog:(0～5)VDCor (4～20)mA	N/A	Digital: RS485 or DeviceNet or EtherCAT Analog:(0～5)VDCor (4～20)mA	N/A
Output Signal	Digital: RS485 or DeviceNet Analog:(0～5)VDC or (4～20)mA
Zero Drift	＜0.6%F.S. per year without autozero
Power Supply	±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA)
surface chemical composition	Chromium/iron ratio>2.0; Chromium oxide thickness>20 angstroms		normalcy
Fittings	VCR 1/2´´
Electronic Connector	9 pin male sub-D ；15 pin male sub-D ； DeviceNetTM male ；EtherCAT
Surface Finish	5μinch Ra		25μinch Ra
Weight	1.8 Kg	1.6 Kg	1.8 Kg	1.6 Kg

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SC184 CS330C User Manual2023.11（不涉密）.pdf

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2023-11-28 09:17:55

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SC186 CS330D User Manual2023.11（不涉密）.pdf

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2023-11-28 09:18:13

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