CS330 Mass Flow Controller & Flowmeter
The CS330 product is a high-end digital product newly developed by Huacheng Electronics, with a maximum flow rate of 200 SLM for nitrogen, and capable of digital/analog control modes. The product adopts a new all-metal sealed structure, a large flow, low pressure loss solenoid regulating valve, and advanced AI robot metal surface polishing technology. It can be used to measure the flow rate of various gases, including inert gases, highly corrosive gases, and flammable/explosive hazardous gases. The product has advantages such as high accuracy, fast response speed, low zero drift, and low temperature drift performance, and supports DeviceNet and RS485 communication protocols.
Product Description
Advantages
• Novel metal sealing structure. This sealing structure has the advantages of reliable sealing, simple assembly process, and corrosion resistance, and is widely used in the measurement of various gas flow rates.
• Small size, low zero drift, and strong anti-interference capability sensor. The sensor adopts an upstream and downstream symmetrical structure design, which ensures that the sensor has a small zero drift; the sensor is equipped with insulation cotton inside, which greatly reduces the influence of ambient temperature on the sensor, thereby improving the anti-interference capability of the sensor and ensuring the accuracy of gas flow detection.
• Advanced artificial intelligence robot surface polishing technology. The surface roughness of CS330 series metal products can reach 0.1RA, and it is manufactured strictly in accordance with SEMI standards.
• CS330 series products support ±8V~±16V dual power supply or +14V~+28V single power supply; support digital and analog input and output.
• CS330 series products support a variety of electrical interfaces, including DB9, DB15, DeviceNet (side, top); support RS485, DeviceNet communication methods.
Technical Parameters
CS330C、D | ||||
| Type | CS330C | CS330D | ||
Valve Type | Normally Closed | None | Normally Closed | None |
Flow Rate (N 2) | (100,200) SLM | |||
Accuracy | ±1.0% S.P. (>35% F.S.) ±0.35% F.S. (≤35% F.S.) | |||
Linearity | ±0.5% F.S. | |||
Repeatability | ±0.2% F.S. | |||
Response Time | ≤ 1 sec | |||
Operating Pressure Range | 400 ~ 600 KPa | <0.03MPa | 400 ~ 600 KPa | <0.03MPa |
Temperature Coefficient | Zero point: ≤±0.02% F.S./℃；Adjustment: ≤±0.1% F.S./℃ | |||
Maximum Operating Pressure | 0.6 MPa | |||
Pressure Resistance | 1 MPa (435pisg) | |||
Leak Rate | 5 x 10 -12 Pa·m 3 / sec He (5 x 10 -11 atm.cc/sec He) | |||
Sealing Material | Metal | |||
Operating Ambient Temperature | (0～50)℃ | |||
Input Signal | Digital: RS485 or DeviceNet or EtherCAT | None | Digital: RS485 or DeviceNet or EtherCAT | None |
Output Signal | Digital: RS485 or DeviceNet or EtherCAT | |||
Zero Drift | <0.6%F.S./year without zero point correction | |||
Power Supply | ±8 ~ ±16 VDC (bipolar) or +14 ~ +28VDC (unipolar) | |||
Surface Chemical Composition | Chromium/Iron ratio >2.0; Chromium oxide thickness >20 angstroms | Normal | ||
Standard Connector Type | VCR 1/2" | |||
Power Connector Type | D-type 9-pin male connector; D-type 15-pin male connector; DeviceNet connector; EtherCAT connector | |||
Surface Roughness | 5μinch Ra | 25μinch Ra | ||
Weight | 1.8 Kg | 1.6 Kg | 1.8 Kg | 1.6 Kg |
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