The CS330C、D MFC/MFM incorporate a dual interface, voltage and current as well as RS-485，DeviceNet and ProfiBus digital interfaces. It is possible to operate the instrument completely digitally or it can be operated in analog mode with digital monitoring. CS330C、D series have wide range of power supply(available for ±8 ～ ±16 VDC or +14 ～ +28 VDC). In addition, autoAlarm, change of operating gas and range available through the digital interface. Customer Secondary Development of control and sample software is available through the open protocol.

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Parameters

　　Specification

Type	CS330
Full scale range (N₂)	(100,200) SLM
Accuracy	±1.0% S.P. (＞35% F.S.) ±0.35% F.S. (≤35% F.S.)
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response Time	≤1sec
Valve Rest Position	Normally Closed or Normally Open	No Valve
Differential Pressure	100 ~ 300 KPa （50＜F≤100SLM） 200 ~ 300 KPa （100＜F≤200SLM）
Temperature Coefficient	Zero:≤±0.05% F.S./℃; Span：≤±0.1% F.S./℃
Maximum Pressure Working	0.45 MPa
Max Pressure	1MPa (435pisg)
Zero Drift	＜0.6%F.S. per year without autozero
Leak integrity	5 x 10^-12 Pa·m³/ sec He （5 x 10^-11 atm.cc/sec He）
Wetted Materials	Metal
Operation Temperature	（0～50）℃
Input Signal	Digital: RS485 or DeviceNetTM Analog:(0～5)VDC or (4～20)mA	N/A
Output Signal	Digital: RS485 or DeviceNetTM Analog:(0～5)VDC or (4～20)mA
Power Supply	±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA)
Electronic Connector	9 pin male sub-D ；15 pin male sub-D ； DeviceNetTM male
Fittings	VCR 1/2´´
Weight	2.6kg	1.5kg
Surface Finish	CS330C:Ra 10 μ inch; CS330d:Ra 10 μ inch;

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SC184 CS330C User Manual2023.1（不涉密）.pdf

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2023-02-09 15:53:23

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SC186 CS330D User Manual2023.1（不涉密）.pdf

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2023-02-09 15:52:29

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