CS200H Mass Flow Controller & Flow Meter
CS200H gas mass flow control is a digital high-temperature product manufactured by Huacheng Electronics. Its electrical and mechanical parts adopt a split design, connected via high-temperature cables, allowing it to operate in high-temperature environments and meet the complex and varied measurement requirements of semiconductors.
Product Description
Advantages
• Controller operating temperature: 90~120℃.
• High control accuracy: Product accuracy can reach ±1.0% S.P.(≥35%F.S.).
• Fast response, response time ≤ 0.8sec.
• Using the constant power sensor principle, corresponding compensation is performed when the temperature changes, fundamentally suppressing the zero drift phenomenon of the flow meter and ensuring the linearity of the sensor.
• High-end products adopt specialized metal surface treatment technology. All metal materials in contact with gas use 316LVV. The surface roughness of CS200 product metal can reach below 10RA, strictly manufactured according to SEMI standards.
• Supports ±8V~±16V dual power supply, +14V~+28V single power supply; digital and analog input and output.
• Product size conforms to the internationally used SEMI standard, RS485, DeviceNet communication method.
Technical Parameters
CS200 | ||
| Type | CS200-H | |
| Valve Type | Normally Closed | None |
| Flow Rate (N2) | (0～2,3,5,10,20,30,50,100,200,300,500) SCCM | |
| Accuracy | ±1.0% S.P. (≥35% F.S.) | |
| Linearity | ±0.5% F.S. | |
| Repeatability | ±0.2% F.S. | |
| Response Time | ≤ 1sec | |
| Operating Pressure Range | 0.05～0.35MPa Flow rate ≤10SLM | ＜0.02 MPa |
| Maximum Operating Pressure | 0.45MPa | |
| Temperature Coefficient | Zero point: ≤±0.1% F.S./℃；Adjustment: ≤±0.1% F.S./℃ | |
| Pressure Resistance | 3MPa | |
| Leak Rate | 1×10 -11 Pa·m 3 / sec He | |
| Sealing Material | Metal Seal | |
| Operating Ambient Temperature | Mass flow controller/flow meter: (90～120)℃; Control box: (0～50)℃ | |
| Input Signal | Digital: RS485 or DeviceNet | None |
| Output Signal | Digital: RS485 or DeviceNet | |
| Zero Drift | Without zero point correction ＜0.6%F.S./year | |
| Power Supply | ±8 ～ ±16 VDC (bipolar) or +14 ～ +28 VDC (unipolar) | |
| Surface Chemical Composition | Cr/Fe ratio ≥2.0, CrO thickness ≥20 (Å) | |
| Surface Roughness | 10 Ra | |
| Standard Connector Type | Double ferrule φ6；Double ferrule 1/4；VCR1/4 male connector；1.5´´C-type seal connector | |
| Power Connector Type | D-type 9-pin male connector; D-type 15-pin male connector; DeviceNet connector | |
| High-temperature cable connection | 2m | |
| Weight | 1.2Kg | 1Kg |
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