CS100 Mass Flow Controller & Flow Meter
The CS100 product is developed based on Huacheng Electronics' CS series product technology platform. Based on its constant power sensor technology, digital sensor balancing technology, and VCP line control technology, it adopts a customer-customized design. Customers can select products that meet their own needs as required. At the same time, its original Customer Zero Compensation Function (CGC) can solve the problem of inaccurate MFC accuracy caused by customer ground wire connection, enabling the product to better adapt to the customer's environment.
Product Description
Advantages
• CS100 products feature customized design,
• Customers can choose between ±15V dual power supply or +24V single power supply as needed;
• Metal seal or rubber seal;
• Product dimensions can be selected from products conforming to international SEMI standards, or compact models can be chosen;
Technical Parameters
CS100 | ||||||||||||||
| Type | CS100A | CS100D | ||||||||||||
| Valve Type | Normally Closed | None | Normally Closed | None | ||||||||||
| Flow Specifications (N2) | (0～10,20,30,50,100,200,300,500) SCCM | (0～10,20,30,50,100,200,300,500) SCCM | ||||||||||||
| Accuracy | ±1.0% S.P. (≥35% F.S.)； ±0.35% F.S.(＜35% F.S.) | |||||||||||||
| Linearity | ±0.5% F.S. | |||||||||||||
| Repeatability | ±0.2% F.S. | |||||||||||||
| Response Time | ≤ 1sec | |||||||||||||
| Operating Differential Pressure Range | 0.05～0.35MPa； Flow specification ≤10SLM | ＜0.02 MPa |
0.05～0.35MPa； Flow specification ≤10SLM | ＜0.02 MPa | ||||||||||
| Temperature Coefficient | Zero point: ≤±0.05% F.S/℃； When regulating: ≤±0.1% F.S/℃ | |||||||||||||
| Pressure Resistance | 3MPa | 10MPa | 3MPa | 10MPa | ||||||||||
| Leak Rate | 1×10 -9 Pa·m 3 / sec He（1×10 -8 atm·cc / sec He） | |||||||||||||
| Seal Material | Fluororubber | Metal Seal | ||||||||||||
| Maximum Operating Pressure | 0.45MPa | |||||||||||||
| Operating Ambient Temperature | （5～45）℃ | |||||||||||||
| Input Signal | Analog: | Digital: RS485 | None | None | Analog: | Digital: RS485 | None | None | ||||||
| Output Signal | Analog: | Digital: RS485 | Analog: (0～5)VDC | Digital: RS485 | Analog: | Digital: RS485 | Analog: | Digital: RS485 | ||||||
| Power Connector Type | D-type 9-pin D-type 15-pin | D-type 9-pin O-type 3-pin | D-type 15-pin Male connector | D-type 9-pin D-type 15-pin | D-type 9-pin male connector; O-type 3-pin male connector | D-type 15-pin male connector | D-type 9-pin D-type 15-pin | D-type 9-pin O-type 3-pin | D-type 15-pin Male connector | D-type 9-pin D-type 15-pin | D-type 9-pin male connector; O-type 3-pin male connector | D-type 15-pin male connector | ||
| Power Supply | ±15V | ±15V | +24V | ±15V | ±15V | +24V | ±15V | ±15V | +24V | ±15V | ±15V | +24V | ||
| Auto Zero | Supported | |||||||||||||
| Surface Roughness | 25μinch Ra | |||||||||||||
| Standard Connector Type | Dual ferrule φ6； Dual ferrule φ3；Dual ferrule 1/4´´；Dual ferrule 1/8´´； VCR1/4´´ male connector; φ6 (ID) x1 hose connector;φ5 (ID) x1.5 hose connector;φ4 (ID) x1 hose connector | VCR1/4″ male connector | ||||||||||||
| Weight | 1.2Kg | 1Kg | 1.2Kg | 1Kg | ||||||||||
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