CS100 MFCs derive from the CS series, sharing the same technologies, Constant-power Sensor, Digital Sensor Balance and Valve Correct Pedestal Technology. CS100 can be customized to specific requirements. Additionally with Customer Ground Correction (CGC) function CS100 is flexible in different operating environments and eliminate the bad influence to accuracy because of the improper connecting of ground wires.

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Product description

Parameters

Features

1. High Accuracy and Fast Response

The accuracy of the CS100 MFC has been improved to ±1.0% of S.P., and its’ response time of less than1 sec.

2. Miscellaneous Functions

Powerful customer software comes standard with each model, while additional functions such as multi-gas，multi-range，auto-zero, alarms, soft start, and delay are available as customer selections.

3. Customization

CS100 can be customized to ±15V double-end or +24V single-end power supply, Rs485 interface, digital or analog input and output, metal seal or elastomer seal, SEMI standard or compact mechanical dimension.

Specification

CS100
Type	CS100A
Valve Rest Position	Normally Closed				No Valve
Full scale range (N₂)	(0～10,20,30,50,100,200,300,500) SCCM (0～1,2,3,5,10,20,30,50) SLM
Accuracy	±1.0% S.P. (≥35% F.S.)； ±0.35% F.S.(＜35% F.S.)
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response Time	≤ 1sec
Differential Pressure	0.05～0.35MPa； FLOW≤10 SLM 0.1～0.35MPa ； 10＜FLOW≤30 SLM 0.25～0.45MPa ； 30＜FLOW≤50 SLM				＜0.02 MPa
Temperature Coefficient	Zero: ≤±0.05% F.S/℃； Span: ≤±0.1% F.S/℃
Max Pressure	3MPa				10MPa
Leak integrity	1×10^-9 Pa·m³ / sec He（1×10^-8 atm·cc / sec He）
Wetted Materials	Viton
maximum operating pressure	0.45MPa
Operation Temperature	（5～45）℃
Input Signal	Analog: (0～5)VDC		Digital: RS485		N/A		N/A
Output Signal	Analog: (0～5)VDC		Digital: RS485		Analog: (0～5)VDC		Digital: RS485
Electronic Connector	9 pin male sub-D； 15 pin male sub-D	9 pin male sub-D； 3 pin male O		15 pin male sub-D	9 pin male sub-D； 15 pin male sub-D	9 pin male sub-D； 3 pin male O		15 pin male sub-D
Power Supply	±15V	±15V		+24V	±15V	15V		+24V
ATUO ZERO	SUPPORT
Surface Finish	25μinch Ra
Fittings	Compression Fittingφ6； Compression Fittingφ3； Compression Fitting1/4´´；Compression Fitting1/8´´； VCR1/4″male； Ф6(inner)×1hose;ф5(inner)×1.5hose;ф4(inner)×1hose;
Weight	1.2Kg				1Kg

Specification

CS100
Type	CS100D
Valve Rest Position	Normally Closed				No Valve
Full scale range (N2)	(0～10,20,30,50,100,200,300,500) SCCM (0～1,2,3,5,10,20,30) SLM
Accuracy	±1.0% S.P. (≥35% F.S.)； ±0.35% F.S.(＜35% F.S.)
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response Time	≤ 1sec
Differential Pressure	0.05～0.35MPa；FLOW≤10 SLM 0.1～0.35MPa；10＜FLOW≤30 SLM				＜0.02 MPa
Temperature Coefficient	Zero: ≤±0.05% F.S/℃； Span: ≤±0.1% F.S/℃
Max Pressure	3MPa				10MPa
Leak integrity	1×10-9 Pa·m3 / sec He（1×10-8 atm·cc / sec He）
Wetted Materials	Metal
maximum operating pressure	0.45MPa
Operation Temperature	（5～45）℃
Input Signal	Analog: (0～5)VDC		Digital: RS485		N/A		N/A
Output Signal	Analog: (0～5)VDC		Digital: RS485		Analog: (0～5)VDC		Digital: RS485
Electronic Connector	9 pin male sub-D； 15 pin male sub-D	9 pin male sub-D； 3 pin male O		15 pin male sub-D	9 pin male sub-D； 15 pin male sub-D	9 pin male sub-D； 3 pin male O		15 pin male sub-D
Power Supply	±15V	±15V		+24V	±15V	±15V		+24V
ATUO ZERO	SUPPORT
Surface Finish	25μinch Ra
Fittings	VCR1/4″male
Weight	1.2Kg				1Kg

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SC170 CS100A User Manual2023.01.pdf

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SC172 CS100D User Manual2023.01.pdf

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SC174 CS100B User Manual2023.01.pdf

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