CS230 MFCs offer a more accurate solution for high flow, whose full scale could be 300 slm N2. The innovational control algorithm in the CS230 MFC improves the response time within 2seconds by either digital or analog control mode. The characteristics of the low zero drift and less temperature coefficient will help this product to minimize the error and achieve more accuracy. Moreover, the DeviceNetTM (by ODVA), RS485 protocols are available in the communication.

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Product description

Parameters

Features

1. High Accuracy and Large Full Scale Range

The accuracy of the CS230 MFC has been improved to ±1.0% of S.P., and the full scale of CS230 MFC can be 300slm.

2. Low Zero Drift and Temperature Coefficient

The invention of new sensor technology enables the CS200 MFC to maintain stability and withstand temperature fluctuations. Without an auto-zero amplifier, the expected zero drift is less than 0.6%F.S./year, and the temperature coefficient is less than 0.02%F.S./℃(zero)，0.05%F.S./ ℃ (span).

3. Compatible Interfaces

The CS230 MFC is compatible with the following interfaces, which may be selected by the customer:±8V-±16V double-end power supply and +14V-+28V single-end power supply; digital or analog signal input and output;

SEMI standard mechanical dimensions; and RS-485 or DeviceNetTM communications module.

4. Miscellaneous Functions

Powerful customer software comes standard with each model, while additional functions such as multi-gas，multi-range，auto-zero, alarms, soft start, and delay are available as customer selections.

Specification

Type	CS230A
Full scale range (N₂)	(50,100,150,200,250,300) SLM
Accuracy	±1.0% S.P. (≥35% F.S.) ±0.35% F.S. (＜35% F.S.)
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response Time	≤2sec
Valve Rest Position	Normally Closed or Normally Open		No Valve
Differential Pressure	0.15～0.35MPa 50SLM≤Flow(N2)＜150SLM 0.20～0.35MPa 150SLM≤Flow(N2)≤250SLM 0.25～0.40MPa 250SLM＜Flow(N2)≤300SLM		50~100SLM：<0.02MPa > 100SLM：<0.05MPa
Temperature Coefficient	Zero:≤±0.05% F.S./℃; Span：≤±0.1% F.S./℃
Maximum Operating Pressure	1 MPa
Max Pressure	3 MPa (435pisg)
Zero Drift	＜0.6%F.S. per year without autozero
Leak integrity	1×10-9 atm·cc / sec He
Wetted Materials	Viton; Neoprene
Operation Temperature	（5～45）℃
Input Signal	Digital: RS485 or DeviceNetTM or ProfiBus Analog:(0～5)VDC or (4～20)mA		N/A
Output Signal	Digital: RS485 or DeviceNetTM or ProfiBus Analog:(0～5)VDC or (4～20)mA
Power Supply	±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA)
Electronic Connector	9 pin male sub-D ；15 pin male sub-D ； DeviceNetTM male; or ProfiBus
Fittings	Compression Fittingφ6；Compression Fitting1/4´´；(available to Flow(N2)≤60SLM) Compression Fittingφ8mm(available to Flow(N2)≤ 200SLM) Compression Fitting φ10mm；Compression Fitting 3/8´´；Compression Fitting 1/2´´；VCR 1/2´´；
Weight	2.6kg	1.5kg