Aurasky releases the new generation CS300 MFC for semiconductor marketing. Based on CS technology platform, CS300 is the latest generation designed especially for large scaled IC equipments .CS300 MFC has the DF based pressure compensation algorithm, improved surface finishing and Specification comply with SEMI standard, also 1.125" IGS W -seal and C-seal interface are available.

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Product description

Parameters

Features

1. High Accuracy and Fast Respond

The accuracy of the CS300 MFC has been improved to ±0.8% of S.P., and the most advanced models have a less than 0.5 sec response time.

2. Low Zero Drift and Temperature Coefficient

The invention of new sensor technology enables the CS230 MFC to maintain stability and withstand temperature fluctuations. Without an auto-zero amplifier, the expected zero drift is less than 0.6%F.S./year, and the temperature coefficient is less than 0.02%F.S./℃(zero)，0.05%F.S./ ℃ (span).

3.Metal-Sealed Models and High Purity Feature

The special metal surface process is applied in CS300. 316 stainless steel VV is used and rough ness could be less than 5 RA which is required by the semi standards.

4. Compatible Interfaces

The CS300 MFC is compatible with the following interfaces, which may be selected by the customer:±8V-±16V double-end power supply and +14V-+28V single-end power supply; digital or analog signal input and output; SEMI standard mechanical dimensions; and RS-485 or DeviceNetTM communications module.

5. Miscellaneous Functions

Powerful customer software comes standard with each model, while additional functions such as multi-gas，multi-range，auto-zero, alarms, soft start, and delay are available as customer selections.

6. CS300 MFCs support 1.125", 1.5" W, C IGS.

Specification

CS300
Type	CS310C			CS320C		CS310D		CS320D
Valve Type	Normally Open	Normally Closed	N/A	Normally Closed or Normally Open	N/A	Normally Closed or Normally Open	N/A	Normally Closed or Normally Open	N/A
Full scale range (N₂)	(0～1,2,3,5,10,20,30,50,100,200,300,500) SCCM (0～1,2,3,5,10,20,30) SLM
Accuracy
Linearity	±0.5% F.S.
Repeatability	±0.2% F.S.
Response Time	≤ 0.8sec （≤ 0.5sec optional）
Differential Pressure	0.05~0.3MPa Flow≤5SLM 0.1~0.3MPa 5SLM<Flow≤10SLM 0.2~0.3MPa Flow>10SLM	0.05～0.35MPa Flow≤10SLM 0.15～0.35MPa Flow＞10SLM	＜0.02 MPa	0.05～0.35MPa Flow≤10SLM 0.15～0.35MPa Flow＞10SLM	＜0.02 MPa	0.05～0.35MPa Flow≤10SLM 0.15～0.35MPa Flow＞10SLM	＜0.02 MPa	0.05～0.35MPa Flow≤10SLM 0.15～0.35MPa Flow＞10SLM	＜0.02 MPa
Temperature Coefficient	Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃
Max Pressure	3.5 MPa	1 MPa	3.5 MPa	3.5 MPa
Leak integrity	1×10^-11 Pa·m³ / sec He
Seal Materials	Metal
maximum operating pressure	0.45MPa
Operation Temperature	（0～50）℃
Input Signal	Digital: RS485 or DeviceNet^TM or EtherCAT Analog:(0～5)VDC		N/A	Digital: RS485 or DeviceNet^TM or EtherCAT Analog:(0～5)VDC	N/A	Digital: RS485 or DeviceNet^TM or EtherCAT Analog:(0～5)VDC	N/A	Digital: RS485 or DeviceNet^TM or EtherCAT Analog:(0～5)VDC	N/A
Output Signal	Digital: RS485 or DeviceNet^TM or EtherCAT Analog:(0～5)VDC
Zero Drift	＜0.6%F.S. per year without autozero
Power Supply	±8～±16 VDC (bipolar) 或 +14～+28 VDC (unipolar)
Surface Chemistry	Cr/Fe ratio ＞2.0; CrO thickness ＞20 Angstroms					-
Surface Finish	Ra 5μinch
Fittings	VCR1/4” M 1.125″C Type 1.125″W Type			1.5″B 1.5″C 1.5″W		VCR1/4” M 1.125″C Type 1.125″W Type		1.5″B 1.5″C 1.5″W
Electronic Connector	9 pin male sub-D ，15 pin male sub-D ，DeviceNet^TM male，EtherCAT
Weight	1 Kg		0.8Kg	1.2Kg	1Kg	1 Kg	0.8Kg	1.2Kg	1Kg

型号	CS310C		CS320C
阀类型	常开或常闭	无	常开或常闭	无
Flow(N2)	(0～1,2,3,5,10,20,30,50,100,200,300,500) SCCM (0～1,2,3,5,10,20,30) SLM
准确度	±1% S.P. (≥35% F.S.) ±0.80% S.P. (≥30% F.S.) ±0.35% F.S. (＜35% F.S.) ±0.24% F.S. (＜30% F.S.)
线性	±0.5% F.S.
重复精度	±0.2% F.S.
响应时间	≤ 0.8sec （≤ 0.5sec optional）
工作压差范围	0.05～0.35MPa Flow≤10SLM 0.15～0.35MPa Flow＞10SLM	＜0.02 MPa	0.05～0.35MPa Flow≤10SLM 0.15～0.35MPa Flow＞10SLM	＜0.02 MPa
温度系数	零点：≤±0.02% F.S./℃；调节时：≤±0.05% F.S./℃
耐压	3.5 MPa
漏率	1×10-11 Pa·m3 / sec He
密封材料	金属密封
最大工作压力	0.45MPa
工作环境温度	（0～50）℃
输入信号	数字：RS485 或 DeviceNet 模拟：(0～5)VDC	无	数字：RS485 或 DeviceNet 模拟：(0～5)VDC	无
输出信号	数字：RS485 或 DeviceNet 模拟：(0～5)VDC
零漂	在没有零点校正时＜0.6%F.S./年
电源	±8～±16 VDC (双极) 或 +14～+28 VDC (单极)
表面化学成分	Cr/Fe比例≥2.0；CrO 厚度≥20 （埃）
表面粗糙度	Ra 5μinch
标准接头形式	VCR1/4阳接头； 1.125″C型密封接头 1.125″W型密封接头		1.5″B型密封接头 1.5″C型密封接头 1.5″W型密封接头
电源接头形式	D型9针阳接头；D型15针阳接头；DeviceNet接头
重量	1 Kg	0.8Kg	1.2Kg	1Kg

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