CS300 Mass Flow Controller & Flowmeter
The CS300 gas mass flow controller is a product specifically designed by Huacheng Electronics for large-scale integrated circuit equipment. Based on the original CS200 gas mass flow controller, this product adopts a DF-based pressure signal compensation algorithm and a new metal surface treatment process. All technical indicators of the product strictly adhere to SEMI standards and it supports W-type and C-type IGS gas path systems.
Product Description
Advantages
Accuracy uses setpoint accuracy, product accuracy can reach ±1.0% S.P., response time fastest ≤ 0.5sec.
CS300 series products can have pressure compensation function, effectively compensating for disturbances in upstream gas pressure, reducing the impact of pressure changes on instantaneous flow, thereby ensuring product stability and accuracy.
Adopting the constant power sensor principle, corresponding compensation is performed when the temperature changes, fundamentally suppressing the zero drift phenomenon of the flowmeter and ensuring sensor linearity.
High-end products use specialized metal surface treatment technology, all metal materials in contact with gas use 316LVV, and the metal surface roughness of CS300C products can reach below 5RA, strictly manufactured according to SEMI standards.
Technical Parameters
CS300 | |||||||||
| Type | CS310C | CS320C | CS310D | CS320D | |||||
Valve Type | Normally Open | Normally Closed | None | Normally Open or Normally Closed | None | Normally Open or Normally Closed | None | Normally Open or Normally Closed | None |
Flow Range (N 2) | (0～1,2,3,5,10,20,30,50,100,200,300,500) SCCM | ||||||||
Accuracy |
| ||||||||
Linearity | ±0.5% F.S. | ||||||||
Repeatability | ±0.2% F.S. | ||||||||
Response Time | ≤ 0.8sec （≤ 0.5sec optional） | ||||||||
Operating Differential Pressure Range | 0.05~0.3MPa Flow Range ≤5SLM 0.1~0.3MPa 5SLM Flow Range >10SLM | 0.05～0.35MPa Flow Range ≤10SLM | ＜0.02 MPa | 0.05～0.35MPa Flow Range ≤10SLM | ＜0.02 MPa | 0.05～0.35MPa Flow Range ≤10SLM | ＜0.02 MPa | 0.05～0.35MPa Flow Range ≤10SLM | ＜0.02 MPa |
Temperature Coefficient | Zero: ≤±0.02% F.S./℃; When adjusting: ≤±0.05% F.S./℃ | ||||||||
Withstand Pressure | 3.5 MPa | 1 MPa | 3.5 MPa | 3.5 MPa | |||||
Leak Rate | 1×10 -11 Pa·m 3 / sec He | ||||||||
Sealing Material | Metal Seal | ||||||||
Maximum Operating Pressure | 0.45MPa | ||||||||
Operating Ambient Temperature | （0～50）℃ | ||||||||
Input Signal | Digital: RS485 or DeviceNet or EtherCAT | None | Digital: RS485 or DeviceNet or EtherCAT | None | Digital: RS485 or DeviceNet or EtherCAT | None | Digital: RS485 or DeviceNet or EtherCAT | None | |
Output Signal | Digital: RS485 or DeviceNet or EtherCAT | ||||||||
Zero Drift | Without zero point correction ＜0.6%F.S./year | ||||||||
Power Supply | ±8～±16 VDC (Bipolar) or +14～+28 VDC (Unipolar) | ||||||||
Surface Chemical Composition | Cr/Fe ratio≥2.0; CrO thickness≥20 (Angstrom) | - | |||||||
Surface Roughness | Ra 5μinch | ||||||||
Standard Connector Type | VCR1/4 Male Connector; | 1.5″ B-type Seal Fitting | VCR1/4 Male Connector; | 1.5″ B-type Seal Fitting | |||||
Power Connector Type | D-type 9-pin Male Connector; D-type 15-pin Male Connector; DeviceNet Connector; EtherCAT Connector | ||||||||
Weight | 1 Kg | 0.8Kg | 1.2Kg | 1Kg | 1 Kg | 0.8Kg | 1.2Kg | 1Kg | |
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