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CS300

Sevenstar releases the new generation CS300 MFC for semiconductor marketing. Based on CS technology platform, CS300 is the latest generation designed especially for large scaled IC equipments byCS300 is the latest generation designed especially for large scaled IC equipments byCS300 is the latest generation designed especially for large scaled IC equipments byCS300 MFC has the DF based pressure compensation algorithm, improved surface finishing and Specification comply with SEMI standard, also 1.125" IGS W -seal and C-seal interface are available.
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Product description
Parameters

  Features

  1. High Accuracy and Fast Respond

  The accuracy of the CS300 MFC has been improved to ±0.8% of S.P., and the most advanced models have a less than 0.5 sec response time.

  2. Low Zero Drift and Temperature Coefficient

  The invention of new sensor technology enables the CS230 MFC to maintain stability and withstand temperature fluctuations. Without an auto-zero amplifier, the expected zero drift is less than 0.6%F.S./year, and the temperature coefficient is less than 0.02%F.S./℃(zero),0.05%F.S./ ℃ (span).

  3.Metal-Sealed Models and High Purity Feature

  The special metal surface process is applied in CS300. 316 stainless steel VV is used and rough ness could be less than 5 RA which is required by the semi standards.

  4. Compatible Interfaces

  The CS300 MFC is compatible with the following interfaces, which may be selected by the customer:±8V-±16V double-end power supply and +14V-+28V single-end power supply; digital or analog signal input and output; SEMI standard mechanical dimensions; and RS-485 or DeviceNetTM communications module.

  5. Miscellaneous Functions

  Powerful customer software comes standard with each model, while additional functions such as multi-gas,multi-range,auto-zero, alarms, soft start, and delay are available as customer selections.

  6. CS300 MFCs support 1.125", 1.5" W, C IGS.

 

  Specification

 

 

CS300

Type

CS310C

CS320C

CS310D

CS320D

Valve Type

Normally Closed or Normally Open

N/A

Normally Closed or Normally Open

N/A

Normally Closed or Normally Open

N/A

Normally Closed or Normally Open

N/A

Full scale range (N2)

( 0~1,2,3,5,10,20,30,50,100,200,300,500)SCCM

( 0~1,2,3,5,10,20,30,50,100,200,300,500)SCCM

( 0~1,2,3,5,10,20,30)SLM

( 0~1,2,3,5,10,20,30)SLM

Accuracy

±1.0% S.P. (≥35% F.S.)    (±0.80% S.P. (≥30% F.S.) optional)

±1.0% S.P. (≥35% F.S.)    (±0.80% S.P. (≥30% F.S.) optional)

±0.35% F.S. (<35% F.S.)   (±0.24% F.S. (<30% F.S.) optional)

±0.35% F.S. (<35% F.S.)   (±0.24% F.S. (<30% F.S.) optional)

Linearity

±0.5% F.S.

±0.5% F.S.

Repeatability

±0.2% F.S.

±0.2% F.S.

Response Time

≤ 0.8 sec (standard)

≤ 0.8 sec (standard)

Differential Pressure

0.05~0.35MPa (Flow≤10slm)

<0.02 Mpa

0.05~0.35MPa (Flow≤10slm)

<0.02MPa

0.05~0.35MPa (Flow≤10slm)

 

<0.02 Mpa

 

0.05~0.35MPa (Flow≤10slm)

 

<0.02MPa

 

0.15~0.35MPa (Flow>10slm)

0.15~0.35MPa (Flow>10slm)

0.15~0.35MPa (Flow>10slm)

0.15~0.35MPa (Flow>10slm)

Temperature

Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃

Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃

Coefficient

 

Max Pressure

3.5MPa  (435pisg)

3.5MPa  (435pisg)

Leak integrity

1×10-11 Pa.m3 / sec He

1×10-11 Pa.m3 / sec He

Seal Materials

Metal

Metal

maximum operating pressure

0.45MPa

0.45MPa

Operation

(0~50)℃

(0~50)℃

Temperature

 

Input Signal

Digital: RS485 or DeviceNetTM

N/A

Digital:RS485 or DeviceNetTM

N/A

Digital: RS485 or DeviceNetTM

 

N/A

 

Digital:RS485 or DeviceNetTM

 

N/A

 

Analog:(0~5)VDC

Analog:(0~5)VDC

Analog:(0~5)VDC

Analog:(0~5)VDC

Output Signal

Digital: RS485 or DeviceNetTM   

Digital: RS485 or DeviceNetTM   

Analog:(0~5)VDC

Analog:(0~5)VDC

Zero Drift

<0.6%F.S. per year without autozero

<0.6%F.S. per year without autozero

Power Supply

±8 ~ ±16 VDC (bipolar) or +14 ~ +28 VDC (unipolar)

±8 ~ ±16 VDC (bipolar) or +14 ~ +28 VDC (unipolar)

Surface Chemistry

Cr/Fe ratio >2.0; CrO thickness >20 Angstroms

-

Surface Finish

Ra 5 μ inch

Ra 25 μ inch

Fittings

VCR1/4” M;

1.5″B

VCR 1/4” M;

1.5″B

1.125″C Type

1.5″C

1.125″C Type

1.5″C

1.125″W Type

1.5″W

1.125″W Type

1.5″W

Electronic Connector

9 pin male sub-D ,15 pin male sub-D ,DeviceNetTM male,

9 pin male sub-D ,15 pin male sub-D ,DeviceNetTM male,

Weight

1kg

0.8kg

1.2kg

1kg

1kg

0.8kg

1.2kg

1kg

 

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