CS300
Features
1. High Accuracy and Fast Respond
The accuracy of the CS300 MFC has been improved to ±0.8% of S.P., and the most advanced models have a less than 0.5 sec response time.
2. Low Zero Drift and Temperature Coefficient
The invention of new sensor technology enables the CS230 MFC to maintain stability and withstand temperature fluctuations. Without an auto-zero amplifier, the expected zero drift is less than 0.6%F.S./year, and the temperature coefficient is less than 0.02%F.S./℃(zero),0.05%F.S./ ℃ (span).
3.Metal-Sealed Models and High Purity Feature
The special metal surface process is applied in CS300. 316 stainless steel VV is used and rough ness could be less than 5 RA which is required by the semi standards.
4. Compatible Interfaces
The CS300 MFC is compatible with the following interfaces, which may be selected by the customer:±8V-±16V double-end power supply and +14V-+28V single-end power supply; digital or analog signal input and output; SEMI standard mechanical dimensions; and RS-485 or DeviceNetTM communications module.
5. Miscellaneous Functions
Powerful customer software comes standard with each model, while additional functions such as multi-gas,multi-range,auto-zero, alarms, soft start, and delay are available as customer selections.
6. CS300 MFCs support 1.125", 1.5" W, C IGS.
Specification
|
CS300 |
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Type |
CS310C |
CS320C |
CS310D |
CS320D |
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Valve Type |
Normally Closed or Normally Open |
N/A |
Normally Closed or Normally Open |
N/A |
Normally Closed or Normally Open |
N/A |
Normally Closed or Normally Open |
N/A |
|
Full scale range (N2) |
( 0~1,2,3,5,10,20,30,50,100,200,300,500)SCCM |
( 0~1,2,3,5,10,20,30,50,100,200,300,500)SCCM |
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( 0~1,2,3,5,10,20,30)SLM |
( 0~1,2,3,5,10,20,30)SLM |
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Accuracy |
±1.0% S.P. (≥35% F.S.) (±0.80% S.P. (≥30% F.S.) optional) |
±1.0% S.P. (≥35% F.S.) (±0.80% S.P. (≥30% F.S.) optional) |
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±0.35% F.S. (<35% F.S.) (±0.24% F.S. (<30% F.S.) optional) |
±0.35% F.S. (<35% F.S.) (±0.24% F.S. (<30% F.S.) optional) |
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Linearity |
±0.5% F.S. |
±0.5% F.S. |
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Repeatability |
±0.2% F.S. |
±0.2% F.S. |
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Response Time |
≤ 0.8 sec (standard) |
≤ 0.8 sec (standard) |
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Differential Pressure |
0.05~0.35MPa (Flow≤10slm) |
<0.02 Mpa |
0.05~0.35MPa (Flow≤10slm) |
<0.02MPa |
0.05~0.35MPa (Flow≤10slm) |
<0.02 Mpa
|
0.05~0.35MPa (Flow≤10slm) |
<0.02MPa
|
|
0.15~0.35MPa (Flow>10slm) |
0.15~0.35MPa (Flow>10slm) |
0.15~0.35MPa (Flow>10slm) |
0.15~0.35MPa (Flow>10slm) |
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Temperature |
Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃ |
Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃ |
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Coefficient |
|
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Max Pressure |
3.5MPa (435pisg) |
3.5MPa (435pisg) |
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Leak integrity |
1×10-11 Pa.m3 / sec He |
1×10-11 Pa.m3 / sec He |
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Seal Materials |
Metal |
Metal |
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maximum operating pressure |
0.45MPa |
0.45MPa |
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Operation |
(0~50)℃ |
(0~50)℃ |
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Temperature |
|
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Input Signal |
Digital: RS485 or DeviceNetTM |
N/A |
Digital:RS485 or DeviceNetTM |
N/A |
Digital: RS485 or DeviceNetTM |
N/A
|
Digital:RS485 or DeviceNetTM |
N/A
|
|
Analog:(0~5)VDC |
Analog:(0~5)VDC |
Analog:(0~5)VDC |
Analog:(0~5)VDC |
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Output Signal |
Digital: RS485 or DeviceNetTM |
Digital: RS485 or DeviceNetTM |
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Analog:(0~5)VDC |
Analog:(0~5)VDC |
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Zero Drift |
<0.6%F.S. per year without autozero |
<0.6%F.S. per year without autozero |
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Power Supply |
±8 ~ ±16 VDC (bipolar) or +14 ~ +28 VDC (unipolar) |
±8 ~ ±16 VDC (bipolar) or +14 ~ +28 VDC (unipolar) |
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Surface Chemistry |
Cr/Fe ratio >2.0; CrO thickness >20 Angstroms |
- |
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Surface Finish |
Ra 5 μ inch |
Ra 25 μ inch |
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Fittings |
VCR1/4” M; |
1.5″B |
VCR 1/4” M; |
1.5″B |
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1.125″C Type |
1.5″C |
1.125″C Type |
1.5″C |
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1.125″W Type |
1.5″W |
1.125″W Type |
1.5″W |
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Electronic Connector |
9 pin male sub-D ,15 pin male sub-D ,DeviceNetTM male, |
9 pin male sub-D ,15 pin male sub-D ,DeviceNetTM male, |
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Weight |
1kg |
0.8kg |
1.2kg |
1kg |
1kg |
0.8kg |
1.2kg |
1kg |

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